Three-Dimensional Fields and Temperatures in a Squat Helicon Reactor

H- to W-mode transitions and properties of a multimode helicon plasma reactor

Magnetically enhanced inductively coupled plasmas (MEICPs) typically display mode jumps as power or the magnetic field is increased. Inductive (H-mode) to helicon (W-mode) transitions in research reactors having uniform axial magnetic fields are often accompanied by a change in the spatial model structure and rapid increase in plasma density. In industrial plasma sources, the magnetic field str...

Wave propagation and power deposition in magnetically enhanced inductively coupled and helicon plasma sources

Magnetically enhanced inductively coupled plasma ~MEICP! and helicon sources for materials processing are of interest because of their ability to deposit power within the volume of the plasma beyond the classical skin depth. The location and manner of power deposition can vary substantially depending on the mode of operation and reactor conditions. The coupling of electromagnetic fields to the ...

Three-dimensional numerical simulation of temperature and flow fields in a Czochralski growth of germanium

For a Czochralski growth of Ge crystal, thermal fields have been analysed numerically using the three-dimensional finite volume method (FLUENT package). The arrangement used in a real Czochralski crystal growth lab included a graphite crucible, heat shield, heating device, thermal insulation and chamber including two gas outlets. We have considered two cases for calculations, which are configur...

Etching silicon by SF 6 in a continuous and pulsed power helicon reactor

Ion beam formation in a very low magnetic field expanding helicon discharge

An ion beam has been measured emerging from a low pressure 0.04 Pa helicon plasma reactor over a narrow range of magnetic field values 1 mT B0 3 mT . The presence of the ion beam occurs simultaneously with a large increase in the plasma density for the same applied magnetic field, produced using a single solenoid half the length of the m=1 rf antenna. The peak central plasma density of 1.5 1017...